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Chemraz 663

Generic Family: Perfluoroelastomer • Supplied by: Greene, Tweed & Co.
Chemraz ® 663, a perfluoroelastomer (FFKM), is engineered to withstand low-temperature Etch and Deposition applications where plasma resistance and the ability to maintain sealing force in a vacuum are critical, such as electrostatic chuck assemblies.
General Properties

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Material Status
Commercial: Active
Documents
description

Technical Datasheet (English)

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Availability
North America
Uses
Semiconductor Applications
Other Properties
Features, Appearance, Density / Specific Gravity, Tensile Stress at 50%, Tensile Stress at 100%, Tensile Strength, Elongation at Break, Compression Set, Durometer Hardness, Glass Transition Temperature, CLTE, Flow (TMA), Additional Properties
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Processing

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Where To Buy

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