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Chemraz 520

Generic Family: Perfluoroelastomer • Supplied by: Greene, Tweed & Co.
Chemraz ® 520 is recommended for a wide variety of semiconductor equipment dry processing applications where seal reliability with minimal contamination is required. Chemraz ® 520 offers excellent performance in static and dynamic plasma and diffusion processes as well as static photolithography processes. Chemraz ® 520 is formulated for use in high sealing load applications and where temperatures do not exceed 464°F (240°C). Due to the hardness of this material, low-temperature applications may require smoother hardware surface finishes of 10 microinches (Ra) and below.
General Properties

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Material Status
Commercial: Active
Documents
description

Technical Datasheet (English)

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Availability
North America
Uses
Seals
Other Properties
Appearance, Forms, Density / Specific Gravity, Tensile Stress at 50%, Tensile Stress at 100%, Tensile Strength, Elongation at Break, Compression Set, Durometer Hardness, Additional Properties
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Processing

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Where To Buy

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